Defect structure of carbon rich a-SiC:H films and the influence of gas and heat treatments
- 15 July 1998
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 84 (2) , 786-795
- https://doi.org/10.1063/1.368138
Abstract
No abstract availableThis publication has 25 references indexed in Scilit:
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