Laser photosublimation of compound semiconductors
- 1 April 1987
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 2 (2) , 244-251
- https://doi.org/10.1557/jmr.1987.0244
Abstract
The visible-laser sublimation of CdTe, HgCdTe, CdS, and GaAs has been studied. A dynamic light guiding has been identified with an active feedback mechanism and is connected to the observation of 0.4 μm wide single-mode guiding structures during deep etching. The incipient stages of sublimation have been studied by mass spectrometry and are discussed in relation to diffusion mechanisms in the solid state.Keywords
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