An investigation of the stoichiometry and impurity content of thin silicon oxide films using Rutherford scattering of MeV α-particles
- 16 October 1972
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 13 (2) , 517-526
- https://doi.org/10.1002/pssa.2210130221
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
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