Cross-sectional transmission electron microscopy observations of c-BN films deposited on Si by ion-beam-assisted deposition
- 1 December 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 253 (1-2) , 72-77
- https://doi.org/10.1016/0040-6090(94)90297-6
Abstract
No abstract availableKeywords
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