Experiments on imaging X‐ray analytical methods

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Abstract
X‐ray induced analysis of matter offers solutions to a great variety of analyst's questions in various disciplines. Based on the physical nature of primary interaction (photoelectric absorption, elastic/inelastic scattering) and on the secondary specimen response (modulated primary radiation, fluorescent radiation, photoelectrons, Auger electrons), a powerful family of different analytical techniques has evolved. This paper emphasizes the methods of x‐ray photoeletron spectrometry (XPS) and x‐ray fluorescence analysis (XRF), covering depth information ranging from ca. 1 nm (XPS) to > 10 μm (XRF). Scanning schemes to extract spatial resolution of the specific analytical signal are presented. These methods operate in (hardware‐based) line‐selection modes during data acquisition and are essentially based on computer‐(software‐)aided data decoding to achieve point information (element map). Operating principles, alternative concepts, experimental set ups, results and some future trends are summarized.

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