A 1 and 2 MV ion implantation facility
- 1 January 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 21 (1) , 296-299
- https://doi.org/10.1016/0168-583x(87)90844-5
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- A new 2 MV single-ended ion accelerator for ion implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985