Planar and spherical retarding-field spectrometers for electron-beam testing: Evaluation and comparison
- 31 December 1987
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 7 (2-4) , 147-154
- https://doi.org/10.1016/s0167-9317(87)80006-0
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Electron beam testingMicroelectronic Engineering, 1986
- In-the-lens secondary electron analyser for IC internal voltage measurements with electron beamsElectronics Letters, 1984
- Secondary electron detection systems for quantitative voltage measurementsScanning, 1983
- Local field effects on voltage contrast in the scanning electron microscopeJournal of Physics D: Applied Physics, 1981