Correction for nonlinearity and polarization-dependent sensitivity in the detection system of rotating analyzer ellipsometers
- 15 April 1989
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 28 (8) , 1504-1507
- https://doi.org/10.1364/ao.28.001504
Abstract
Systematic errors due to nonlinearity and polarization-dependent sensitivity in the detection system of rotating analyzer ellipsometers are described. Post Fourier analysis procedures for detection and correction of these effects are presented.Keywords
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