Diffusion profile of spin-on dopant in silicon substrate
- 30 November 1989
- journal article
- Published by Elsevier in Solar Energy Materials
- Vol. 19 (3-5) , 237-247
- https://doi.org/10.1016/0165-1633(89)90009-9
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Alteration of diffusion profiles in semiconductors due to p-n junctionsSolid-State Electronics, 1982
- Phosphorus Diffusion in Silicon from a Spin‐on P‐Doped Silicon Oxide FilmJournal of the Electrochemical Society, 1979
- A Quantitative Model for the Diffusion of Phosphorus in Silicon and the Emitter Dip EffectJournal of the Electrochemical Society, 1977
- Resistivity of Bulk Silicon and of Diffused Layers in SiliconBell System Technical Journal, 1962