Kinetic Effects and Mechanisms Limiting Substitutional Solubility in the Formation of Supersaturated Alloys by Pulsed Laser Annealing
- 1 January 1980
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Supersaturated substitutional alloys formed by ion implantation and pulsed laser annealing of group-III and group-V dopants in siliconJournal of Applied Physics, 1980
- Laser Annealing of Ion-Implanted SemiconductorsScience, 1979
- Effects of pulsed ruby-laser annealing on As and Sb implanted siliconJournal of Applied Physics, 1979
- Theoretical analysis of thermal and mass transport in ion-implanted laser-annealed siliconApplied Physics Letters, 1978
- Unidirectional contraction in boron-implanted laser-annealed siliconApplied Physics Letters, 1978
- Solute trapping by rapid solidificationActa Metallurgica, 1969
- Solid Solubilities of Impurity Elements in Germanium and Silicon*Bell System Technical Journal, 1960