Three-dimensional photonic crystals based on macroporous silicon with modulated pore diameter
- 21 February 2001
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 78 (9) , 1180-1182
- https://doi.org/10.1063/1.1351533
Abstract
We report on the fabrication and optical characterization of a three-dimensional (3D) photonic crystal on the basis of macroporous silicon. The structure consists of a 2D array of air pores in silicon whose diameter is varied (modulated) periodically with depth. The bandstructure of the resulting 3D hexagonal photonic crystal is calculated and compared with transmission measurements. The described structure allows to adjust the dispersion relation along the pore axis almost independently from the dispersion relation in the plane perpendicular to the pore axis.Keywords
This publication has 7 references indexed in Scilit:
- Photonic crystals from macroporous siliconPublished by Springer Nature ,2007
- Membranes for Micropumps from Macroporous SiliconPhysica Status Solidi (a), 2000
- Three-dimensional characterisation of a two-dimensional photonic bandgap reflector at midinfrared wavelengthsIEE Proceedings - Optoelectronics, 1998
- Macroporous Silicon: A Two-Dimensional Photonic Bandgap Material Suitable for the Near-Infrared Spectral RangePhysica Status Solidi (a), 1998
- Two-dimensional infrared photonic band gap structure based on porous siliconApplied Physics Letters, 1995
- The Physics of Macropore Formation in Low Doped n‐Type SiliconJournal of the Electrochemical Society, 1993
- Formation Mechanism and Properties of Electrochemically Etched Trenches in n‐Type SiliconJournal of the Electrochemical Society, 1990