Capacitive humidity sensor with controlled performances, based on porous Al2O3 thin film growm on SiO2-Si substrate
- 1 April 1994
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 19 (1-3) , 551-553
- https://doi.org/10.1016/0925-4005(93)01082-f
Abstract
No abstract availableKeywords
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- Humidity sensitive MIS structureJournal of Physics E: Scientific Instruments, 1985
- Effects of Water Vapour on the Electrical Properties of Anodized AluminiumNature, 1953