Efficient electrothermal actuation of multiple modes of high-frequency nanoelectromechanical resonators
- 26 February 2007
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 90 (9) , 093116
- https://doi.org/10.1063/1.2709620
Abstract
The authors observed resonances from multiple vibrational modes of individual silicon-carbide-based nanomechanical resonators, covering a broad frequency range from several megahertz to over a gigahertz. The devices are actuated thermoelastically in vacuum at room temperature using localized Joule heating in a device-integrated metal loop. Their motion is detected piezoresistively using signal downmixing in a similarly integrated metal piezoresistor. The frequencies and amplitudes of the observed resonant peaks are in good agreement with the results from theoretical modeling and finite-element simulations.Keywords
This publication has 21 references indexed in Scilit:
- Efficient and Sensitive Capacitive Readout of Nanomechanical Resonator ArraysNano Letters, 2006
- Ultrahigh Frequency Nanotube ResonatorsPhysical Review Letters, 2006
- Photothermal operation of high frequency nanoelectromechanical systemsApplied Physics Letters, 2006
- Zeptogram-Scale Nanomechanical Mass SensingNano Letters, 2006
- Sensitive detection of nanomechanical motion using piezoresistive signal downmixingApplied Physics Letters, 2005
- Single spin detection by magnetic resonance force microscopyNature, 2004
- Nanometre-scale displacement sensing using a single electron transistorNature, 2003
- Femtogram mass detection using photothermally actuated nanomechanical resonatorsApplied Physics Letters, 2003
- High-sensitivity piezoresistive cantilevers under 1000 Å thickApplied Physics Letters, 1999
- Analysis of Bi-Metal ThermostatsJournal of the Optical Society of America, 1925