Metal ion source using rf discharge combined with sputtering

This publication has 9 references indexed in Scilit:

• The Frankfurt PIG ion source
  Nuclear Instruments and Methods in Physics Research, 1981
• Production of high-current metal ion beams
  Nuclear Instruments and Methods in Physics Research, 1981
• Aspects of the physics, chemistry, and technology of high intensity heavy ion sources
  Nuclear Instruments and Methods in Physics Research, 1981
• The technology and chemistry of heavy ion sources
  Nuclear Instruments and Methods, 1973
• Metal Ion Source for Ion Implantation System
  Japanese Journal of Applied Physics, 1972
• A sputtering ion source
  Nuclear Instruments and Methods, 1965
• High Efficiency Source for Metal Ions
  Review of Scientific Instruments, 1965
• On some properties of the radio frequency ion source with longitudinal magnetic field
  Nuclear Instruments and Methods, 1959
• Design and Performance of a Radio-Frequency Ion Source
  Review of Scientific Instruments, 1953