A bistable microrelay based on two-segment multimorph cantilever actuators
- 27 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- A Novel Micromechanical Temperature Memory SensorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 GhzPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A bistable snapping microactuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A low-power transponder IC for high-performance identification systemsIEEE Journal of Solid-State Circuits, 1995
- On a micro-electro-mechanical nonvolatile memory cellIEEE Transactions on Electron Devices, 1990