Quantitative in situ FTIR studies of polymers irradiated with synchrotron radiation
- 15 March 1996
- journal article
- Published by Elsevier in Chemical Physics
- Vol. 204 (1) , 129-134
- https://doi.org/10.1016/0301-0104(95)00388-6
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
- Radiation chemistry of poly(lactides) as new polymer resists for the LIGA processJournal of Micromechanics and Microengineering, 1994
- Metal micromechanisms via deep X-ray lithography, electroplating and assemblyJournal of Micromechanics and Microengineering, 1992
- The LIGA technique-what are the new opportunitiesJournal of Micromechanics and Microengineering, 1992
- Synchrotron infrared spectroscopy at megabar pressures: Vibrational dynamics of hydrogen to 180 GPaPhysical Review Letters, 1992
- Infrared synchrotron radiation instrumentation and applicationsNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1992
- Reflection absorption infrared spectroscopy at the Daresbury SRSReview of Scientific Instruments, 1992
- The initial scientific program at the NSLS infrared beamlineNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1990
- Requirements on resist layers in deep-etch synchrotron radiation lithographyJournal of Vacuum Science & Technology B, 1988
- The radiation chemistry of poly(methyl methacrylate) polymer resistsJournal of Vacuum Science & Technology A, 1988
- Negative Photoresists For Deep-UV LithographyPublished by SPIE-Intl Soc Optical Eng ,1984