Thermodynamic analysis for InGaAsP epitaxial growth by the chloride-CVD process
- 1 June 1980
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 49 (2) , 325-333
- https://doi.org/10.1016/0022-0248(80)90168-2
Abstract
No abstract availableFunding Information
- Ministry of Education, Culture, Sports, Science and Technology
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