A novel sample preparation technique for cross-sectional tem investigation of integrated circuits
- 1 January 1983
- journal article
- research article
- Published by Elsevier in Ultramicroscopy
- Vol. 11 (4) , 303-305
- https://doi.org/10.1016/0304-3991(83)90010-4
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Advances in Transmission Electron Microscope Techniques Applied to Device Failure AnalysisJournal of the Electrochemical Society, 1980
- Cross-sectional specimens for transmission electron microscopyJournal of Applied Physics, 1974