Possibilities of X-Ray Interfernce Diffractometry for the Investigation of Ion-Doped Layers

This publication has 3 references indexed in Scilit:

• Interference thickness oscillations of an X-ray wave on periodically profiled silicon
  Physica Status Solidi (a), 1988
• Characterization of lattice damage in ion implanted silicon by multiple crystal x-ray diffraction
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
• Experimental investigation of X-ray Bragg diffraction on the periodic surface relief of a perfect crystal
  Physica Status Solidi (a), 1986