Enhancement of Thin-Film Adhesion by MeV-ION and keV Electron Bombardment
- 1 January 1988
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Heavy-ion induced adhesion of thin gold films to oxidized substrates of tantalum and siliconNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Influence of low-energy electron irradiation on the adhesion of gold films on a silicon substrateApplied Physics Letters, 1986
- MeV ion damage in GaAs single crystals: Strain saturation and role of nuclear and electronic collisions in defect productionPhysical Review B, 1986
- Proton beam enhanced adhesion of iron filmsHyperfine Interactions, 1986
- Two types of MeV ion beam enhanced adhesion for Au films in SiO2Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Track damage and erosion of insulators by ion-induced electronic processesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1984
- Thin-film adhesion changes induced by electron irradiationApplied Physics Letters, 1984
- Ion Beam Enhanced AdhesionMRS Proceedings, 1983
- The Radiation Enhanced Adhesion of Gold on PTFEMRS Proceedings, 1983
- Ion-beam-enhanced adhesion in the electronic stopping regionNuclear Instruments and Methods in Physics Research, 1982