Dependence of nitrogen content and deposition rate on nitrogen pressure and laser parameters in ArF excimer laser deposition of carbon nitride films
- 1 December 2000
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 168 (1-4) , 248-250
- https://doi.org/10.1016/s0169-4332(00)00610-3
Abstract
No abstract availableKeywords
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