Failure analysis of microcircuitry by scanning electron microscopy
- 1 February 1967
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 6 (1) , 9-16
- https://doi.org/10.1016/0026-2714(67)90004-2
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- DIRECT OBSERVATION OF MOS TRANSISTOR CHANNEL ``PINCH-OFF'' BY SCANNING ELECTRON MICROSCOPYApplied Physics Letters, 1966
- Scanning Electron Microscope as a Means of Studying Microplasmas at High ResolutionJournal of Applied Physics, 1966
- The direct observation of electrical leakage paths due to crystal defects by use of the scanning electron microscopeSolid-State Electronics, 1966
- Evaluation of Passivated Integrated Circuits Using the Scanning Electron MicroscopeJournal of the Electrochemical Society, 1964