Coupling gratings as waveguide functional elements
- 1 July 1996
- journal article
- Published by IOP Publishing in Pure and Applied Optics: Journal of the European Optical Society Part A
- Vol. 5 (4) , 453-469
- https://doi.org/10.1088/0963-9659/5/4/010
Abstract
Waveguide grating couplers allow the essential function of waveguide access to be integrated together with optical processing functions on a monolithic planar substrate. Grating coupling technology is topologically and, to a large extent, technologically compatible with the planar processes which define the optical processing waveguide circuit. Poor coupling efficiency, highly dispersive character, absence of user-friendly modelling tools and fabrication difficulties have long prevented this technology from being implemented into practical sensors and microsystems. This paper makes a review of the points where decisive technological progress has been made, illustrates some useful features of waveguide coupling gratings and underlines some of the difficulties which the designer may encounter.Keywords
This publication has 33 references indexed in Scilit:
- Sensitivity optimization of a grating coupled evanescent wave immunosensorSensors and Actuators B: Chemical, 1995
- Normalized expressions for the optical sensitivity of evanescent wave sensorsOptics Letters, 1994
- Integrated-optic grating-scale-displacement sensor using linearly focusing grating couplersIEEE Photonics Technology Letters, 1994
- Spatial-phase-locked electron-beam lithography: Initial test resultsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993
- Holographic mask alignerOptical Engineering, 1993
- Plasma Impulse CVD Deposited TiO2 Waveguiding Films: Properties and Potential Applications in Integrated Optical Sensor SystemsMRS Proceedings, 1992
- Novel method to fabricate corrugation for a λ/4-shifted distributed feedback laser using a grating photomaskApplied Physics Letters, 1989
- Integrated optics components and devices using periodic structuresIEEE Journal of Quantum Electronics, 1986
- Diffraction coupling of radiation into a thin-film waveguideSoviet Journal of Quantum Electronics, 1975
- Efficiency of optical-grating couplersJournal of the Optical Society of America, 1973