Ultraviolet photoresponse of porous ZnO thin films prepared by unbalanced magnetron sputtering
- 25 January 2002
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 80 (4) , 553-555
- https://doi.org/10.1063/1.1445480
Abstract
Fast ultraviolet photoresponse is observed in ZnO thin films prepared by unbalanced magnetron sputtering. Films with a porous microstructure and a mixed (100), (002) and (101) crystallographic orientation exhibit photoresponse with good linearity and minimal aging effects. A fast rise time of 792 ms and a fall time of 805 ms are observed under low intensity (9.5 mW/cm2, ultraviolet light.
Keywords
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