A production ready, 6-18 GHz five-bit phase shifter with integrated CMOS compatible digital interface circuitry

Abstract
A producible, high yield, MMIC (monolithic microwave integrated circuit) 6-18 GHz 5-bit phase shifter with integrated standard CMOS compatible digital interface circuitry has been developed for use over the -55 degrees to +90 degrees C temperature range. The phase shifter was fabricated in production quantities using a standard microwave process. The phase shifter has an RMS phase error

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