Laser-induced oxidation of silicon
- 1 September 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 83 (4) , L173-L176
- https://doi.org/10.1016/0040-6090(81)90658-1
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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- Heat treating and melting material with a scanning laser or electron beamJournal of Applied Physics, 1977
- Investigation of the chemical properties of stain films on silicon by means of infrared spectroscopySurface Science, 1965