Bistable microvalve with pneumatically coupled membranes
- 1 January 1996
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
- Fabrication Of An Electrostatic Microactuator With An S-shaped FilmPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Electrostatically Excited Diaphragm Driven As A LoudspeakerPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A bistable snapping microactuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A threshold pressure switch utilizing plastic deformation of siliconPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Microfabrication of complex surface topographies using grey-tone lithographySensors and Actuators A: Physical, 1995
- The formation of very flat silicon sidewalls by dry etchingJournal of Micromechanics and Microengineering, 1994
- Buckled membranes for microstructuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1994
- A new electrostatic actuator providing improved stroke length and forcePublished by Institute of Electrical and Electronics Engineers (IEEE) ,1992
- Surface-normal electrostatic/pneumatic actuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1992
- On a micro-electro-mechanical nonvolatile memory cellIEEE Transactions on Electron Devices, 1990