Mechanism of columnar microstructure growth in titanium oxide thin films deposited by ion-beam assisted deposition
- 1 November 1999
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 17 (6) , 3379-3384
- https://doi.org/10.1116/1.582069
Abstract
No abstract availableKeywords
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