A silicon-silicon nitride membrane fabrication process for smart thermal sensors
- 1 April 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 42 (1-3) , 666-671
- https://doi.org/10.1016/0924-4247(94)80072-3
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- DIMES-01, a baseline BIFET process for smart sensor experimentationSensors and Actuators A: Physical, 1993
- Integrated grating/detector array fabricated in silicon using micromachining techniquesSensors and Actuators A: Physical, 1992
- Sensor technology strategy in siliconSensors and Actuators A: Physical, 1992
- Thermal microtransducers by CMOS technology combined with micromachiningMicroelectronic Engineering, 1991
- Integrated micromechanical sensors and actuators in siliconMechatronics, 1991
- Integrated thermopile sensorsSensors and Actuators A: Physical, 1990