Non-destructive characterization of materials by evanescent microwaves

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Abstract
A microstrip quarter wavelength ( lambda g/4) resonator in conjunction with a small probe is used to resolve objects with characteristic dimensions as small as a thousandth of the wavelength ( lambda g/1000). The characteristic length for the decay of the evanescent waves at the tip of the probe was measured to be approximately 100-150 mu m at a microwave frequency of 1 GHz ( lambda free approximately=30 cm). The authors applied this technique to map microwave conductivity of metallic lines on glass and printed circuit boards and to investigate conductivity variations across a silicon wafer. It was possible to detect holes in printed circuit boards that were covered with solder and were not detectable otherwise.

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