Simplified models for the Monte Carlo simulation of energy distributions of keV electrons transmitted or back-scattered in various solids

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Abstract
Simplified models, based on stopping power, transport mean free path and classical straggling, are shown to give results rather good agreement with experiment and comparable with the results of more detailed, direct Monte Carlo procedure hitherto constructed. The small effects of features such as large-angle scattering and the interaction between straggling and scattering are studied. A description based on the near linearity of the transport mean free path lambda tr(s) is used to obtain empirical corrections in some cases of the total transmission and back-scattering simulation and empirical estimates of the (Bethe) range and the transport mean free path. The estimates of the range are consistent with a rough calculation of the effect of large binding energies.