Sputter Synthesis of Ba2YCu3Oy As-Deposited Superconducting Thin Films from Stoichiometric Target–A Mechanism of Compositional Deviation and Its Control
- 1 April 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (4A) , L639
- https://doi.org/10.1143/jjap.27.l639
Abstract
A mechanism of compositional deviation of Ba-Y-Cu-O films during sputtering has been investigated, and a process for obtaining as-deposited superconducting films from a stoichiometric target has been developed. The main factor of the deviation is the radiation of high-energy electrons emitted from the oxide target with a low work function onto the growing surface. By eliminating the electron bombardment, films with the same composition were obtained reproducibly. As-grown films 4000 Å thick deposited at 580°C showed T c ( ρ=0) of 82.5 K and an excellent surface smoothness.Keywords
This publication has 9 references indexed in Scilit:
- Low-temperature process for the preparation of high T c superconducting thin filmsApplied Physics Letters, 1987
- Synthesis of Y-Ba-Cu-O Thin Films on Sapphire Substrates by RF Magnetron SputteringJapanese Journal of Applied Physics, 1987
- Largely Anisotropic Superconducting Critical Current in Epitaxially Grown Ba2YCu3O7-y Thin FilmJapanese Journal of Applied Physics, 1987
- High Tc Superconductivity in Screen Printed Yb-Ba-Cu-O FilmsJapanese Journal of Applied Physics, 1987
- Deposition of SrxLa2-xCuO4-y Thin Films by SputteringJapanese Journal of Applied Physics, 1987
- Superconductivity at 93 K in a new mixed-phase Y-Ba-Cu-O compound system at ambient pressurePhysical Review Letters, 1987
- Possible highT c superconductivity in the Ba?La?Cu?O systemZeitschrift für Physik B Condensed Matter, 1986
- Preparation of barium ferrite films with perpendicular magnetic anisotropy by DC sputteringIEEE Transactions on Magnetics, 1981
- Preparation of Garnet Films by SputteringJournal of Applied Physics, 1968