Wear at microscopic scales and light loads for MEMS applications
- 28 February 1995
- Vol. 181-183, 426-435
- https://doi.org/10.1016/0043-1648(95)90051-9
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Finite-element analysis of rotor stability in an axial-drive micromotorJournal of Micromechanics and Microengineering, 1994
- Tribology of Ion Bombarded Silicon for Micromechanical ApplicationsJournal of Tribology, 1993
- Friction and wear studies of silicon in sliding contact with thin-film magnetic rigid disksJournal of Materials Research, 1993
- Static friction of diamond-like carbon film in MEMSSensors and Actuators A: Physical, 1992
- Measurement of wear in polysilicon micromotorsIEEE Transactions on Electron Devices, 1992
- In situ friction and wear measurements in integrated polysilicon mechanismsSensors and Actuators A: Physical, 1990
- A study of three microfabricated variable-capacitance motorsSensors and Actuators A: Physical, 1990
- MicrodyanmicsSensors and Actuators A: Physical, 1990
- Integrated fabrication of polysilicon mechanismsIEEE Transactions on Electron Devices, 1988
- Characterization of diamondlike carbon films and their application as overcoats on thin-film media for magnetic recordingJournal of Vacuum Science & Technology A, 1987