Epitaxial Growth of γ-In2Se3 Films by Molecular Beam Epitaxy

Abstract
Epitaxial growth of γ-In2Se3 film was investigated by molecular beam epitaxy (MBE). γ-In2Se3 epiataxial films with a defect wurtzite structure were successfully grown on GaAs(111)B substrates for the first time. The crystal structure of the γ-In2Se3 epitaxial film was determined by X-ray diffraction (XRD) and atomic force microscopy (AFM). It was found that γ-In2Se3 epitaxial films exhibit a vacancy-ordered crystal structure and that sharrow hexagonal cone structures were formed on the film surface. Furthermore, optical properties of the γ-In2Se3 epitaxial films were investigated by spatially resolved cathodoluminescence (CL).