Experimental adaptation of model parameters for microelectromechanical systems (MEMS)
- 31 July 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 62 (1-3) , 760-764
- https://doi.org/10.1016/s0924-4247(97)01578-1
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Characterization of the electrostatic bonding of silicon and Pyrex glassJournal of Micromechanics and Microengineering, 1995