Calculation of concentration profiles and surface concentration from sheet-conductance measurements of diffused layers
- 31 July 1960
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 1 (3) , 164-171
- https://doi.org/10.1016/0038-1101(60)90002-2
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Evaluation of the Surface Concentration of Diffused Layers in SiliconBell System Technical Journal, 1958
- Conductivity Mobilities of Electrons and Holes in Heavily Doped SiliconPhysical Review B, 1957
- Diffusion of Donor and Acceptor Elements in SiliconJournal of Applied Physics, 1956
- The Potentials of Infinite Systems of Sources and Numerical Solutions of Problems in Semiconductor EngineeringBell System Technical Journal, 1955
- Diffusion of Impurities in GermaniumPhysical Review B, 1954
- Diffusion of Donor and Acceptor Elements into GermaniumPhysical Review B, 1952