Vacuum arc ion sources for particle accelerators and ion implantation
- 1 January 1993
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 21 (5) , 537-546
- https://doi.org/10.1109/27.249640
Abstract
No abstract availableThis publication has 54 references indexed in Scilit:
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