On the macroparticle flux from vacuum arc cathode spots
- 1 October 1993
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 21 (5) , 440-446
- https://doi.org/10.1109/27.249623
Abstract
The macroparticle contamination of vacuum-arc-deposited thin films generated by a plasma source with an optional axial magnetic field is studied. Emphasis is placed on the macroparticle flux near the discharge axis. The arc current, metal species, deposition system geometry and axial magnetic field strength are varied. Distribution functions for macroparticles of Pb, Ag, Cu, Pt, W, and Ni are determined, normalized to the film thickness deposited or the charge transferred. The application of the axial magnetic field leads to a considerable reduction of the normalized macroparticle flux since the plasma is effectively focused by the field, whereas the macroparticle production is not influenced. The macroparticle content normalized to the deposited film thickness is reduced to about 20-35% of that without an additional magnetic field.<>Keywords
This publication has 29 references indexed in Scilit:
- Time dependence of vacuum arc parametersIEEE Transactions on Plasma Science, 1993
- T-DYN Monte Carlo simulations applied to ion assisted thin film processesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- Transport of vacuum arc plasma through straight and curved magnetic ductsJournal of Applied Physics, 1989
- Multiply charged metal ion beamsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Multiply stripped ion generation in the metal vapor vacuum arcJournal of Applied Physics, 1988
- Zirconium nitride films prepared by cathodic arc plasma deposition processSurface and Coatings Technology, 1987
- Measurement of Particles and Vapor Density after High-Current Vacuum Arcs by Laser TechniquesIEEE Transactions on Plasma Science, 1987
- Plasma flux motion in a toroidal plasma guidePlasma Physics and Controlled Fusion, 1986
- The Interaction of Vacuum Arc Ion Currents with Axia I Magnetic FieldsIEEE Transactions on Plasma Science, 1983
- Erosion products from the cathode spot region of a copper vacuum arcJournal of Applied Physics, 1978