Multilayer ISFET membranes for microsystems applications

This publication has 5 references indexed in Scilit:

• Compatibility of ISFET and CMOS technologies for smart sensors
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
• A CMOS-integrated 'ISFET-operational amplifier' chemical sensor employing differential sensing
  IEEE Transactions on Electron Devices, 1989
• A process for the combined fabrication of ion sensors and CMOS circuits
  IEEE Electron Device Letters, 1988
• An Integrated Sensor for Electrochemical Measurements
  IEEE Transactions on Biomedical Engineering, 1986
• Methods of isfet fabrication
  Sensors and Actuators, 1981