Thermomechanical Behaviour of Stress-Reduced Silicon Wafers
- 16 November 1982
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 74 (1) , K1-K3
- https://doi.org/10.1002/pssa.2210740144
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Dislocations in thermally stressed silicon wafersApplied Physics Letters, 1973