Thermal and pulsed laser evaporation of single phase AsxP1−x alloys

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Abstract
The atomic and molecular species evolved during thermal and pulsed laser evaporation of single phase AsxP1−x alloys have been examined using mass spectroscopy. Thermal evaporation yields tetratomic molecules of the form As4−nPn (n=0, 1, 2, 3, 4) as well as diatomic As2, P2, and AsP. Pulsed laser vaporization using a Q‐switched train of 1.06‐μ neodymium: yttrium aluminum garnet (Nd:YAG) pulses primarily evolves atomic As and P species, some fraction of which are ionized. The generation of atomic beams containing one or more of the group V elements from a homogeneous source of controllable stoichiometry has some potential applications for the growth of optoelectronic thin films.