Phase stability for the in situ growth of Nd1+xBa2−xCu3Oy films using pulsed-laser deposition
- 4 January 1999
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 74 (1) , 96-98
- https://doi.org/10.1063/1.123162
Abstract
We have determined the stability line in the phase space for the synthesis of (NdBCO) films. A systematic study of and dependence on oxygen partial pressure and temperature for the deposition of thin NdBCO films grown by pulsed-laser deposition was performed. The conditions for optimal NdBCO film growth were determined by varying oxygen partial pressure from 0.02 to 400 mTorr, and substrate temperature between 730 and 800 °C. The results show that the best NdBCO films are obtained at oxygen pressures in the range of 0.2–1.2 mTorr, depending on the substrate temperature. This is more than two orders-of-magnitude lower than the correspondent oxygen pressure appropriate for film growth.
Keywords
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