Ion implantation and sputtering in the presence of reactive gases: Bombardment-induced incorporation of oxygen and related phenomena
- 1 May 1981
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 52 (5) , 3341-3352
- https://doi.org/10.1063/1.329156
Abstract
No abstract availableThis publication has 40 references indexed in Scilit:
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