Charged and excited states of sputtered atoms
- 1 January 1991
- book chapter
- Published by Springer Nature
Abstract
No abstract availableThis publication has 237 references indexed in Scilit:
- Atomic excitations in sputtering studied with the use of composite targetsZeitschrift für Physik B Condensed Matter, 1988
- Oxygen and titanium sputtering yields as determined by laser fluorescence and auger electron spectroscopy for monolayer oxygen coverage of polycrystalline TiJournal of Nuclear Materials, 1982
- Optical excitation during ion bombardment of copper under channeling conditionsNuclear Instruments and Methods, 1976
- Secondary ion emission from polycrystalline molybdenum: Energy and angular distributionsNuclear Instruments and Methods, 1976
- Line shape measurements of atoms sputtered from polycrystalline Cu, Zn, and Al by 300 keV Ar+ bombardmentNuclear Instruments and Methods, 1976
- On the spectrum emitted by excited particles ejected from the surface of a calcium target by a beam of Ar+ ionsNuclear Instruments and Methods, 1976
- The influence of chemically active gas on the light emission of metallic targets bombarded by positive ionsApplied Physics A, 1975
- An experimental study of optical radiation from sputtered speciesThe European Physical Journal A, 1974
- Excitation of Cu atoms by Ar ions and subsequent radiationless deexcitation of scattered particles near a Cu surfacePhysica, 1969
- On the excited state of sputtered particlesNuclear Instruments and Methods, 1965