Oxygen and titanium sputtering yields as determined by laser fluorescence and auger electron spectroscopy for monolayer oxygen coverage of polycrystalline Ti
- 1 November 1982
- journal article
- Published by Elsevier in Journal of Nuclear Materials
- Vol. 111-112, 738-743
- https://doi.org/10.1016/0022-3115(82)90298-7
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
- Velocity distribution of sputtered Zr atoms as determined by laser induced fluorescence spectroscopySurface Science, 1981
- Velocity distribution of sputtered U atoms as determined by laser induced fluorescence spectroscopyNuclear Instruments and Methods, 1981
- Dependence of light-ion sputtering yields of iron on ion fluence and oxygen partial pressureJournal of Nuclear Materials, 1980
- Sputter-erosion and impurity emission from titanium and vanadium at low-energy ion bombardmentJournal of Nuclear Materials, 1978
- On the influence of reactive gases on sputtering and secondary ion emissionApplied Physics A, 1978
- Interaction of oxygen and nitrogen with clean transition metal surfacesSurface Science, 1978
- Energy analyzed secondary ion mass spectroscopy and simultaneous Auger and XPS measurements of ion bombarded surfacesNuclear Instruments and Methods, 1978
- Sputtering of metals in the presence of reactive gasesThin Solid Films, 1977
- Determination of ion fraction and energy analysis of sputtered particles from deuterium bombarded surfacesJournal of Nuclear Materials, 1976
- Investigation of surface reactions by the static method of secondary ion mass spectrometry: V. The oxidation of titanium, nickel, and copper in the monolayer rangeSurface Science, 1974