The preparation of transparent ZnO: Al thin films
- 1 February 1992
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 117 (1-4) , 939-942
- https://doi.org/10.1016/0022-0248(92)90888-p
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Aging characteristics of conducting and transparent thin film of Al doped ZnO.SHINKU, 1987
- Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron SputteringJapanese Journal of Applied Physics, 1985
- Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron SputteringJapanese Journal of Applied Physics, 1984
- Highly conductive and transparent zinc oxide films prepared by rf magnetron sputtering under an applied external magnetic fieldApplied Physics Letters, 1982
- Facing targets type of sputtering method for deposition of magnetic metal films at low temperature and high rateIEEE Transactions on Magnetics, 1980