Coplanar waveguide transmission lines and highQ inductors on CMOS grade silicon using photoresist and polyimide

28 October 1999

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 35 (22) , 1957-1958
https://doi.org/10.1049/el:19991298

Abstract

Gold coplanar waveguide (CPW) transmission lines with losses of < 0.5 dB/mm at 60 GHz have been produced on CMOS grade silicon substrates using a 15 µm thick layer of either photoresist or polyimide. This process, together with an electroplated interconnect technique, has been used to produce spiral inductors on a 2 Ω/cm n-Si substrate with a Q of 15 and L of 1.2 nH at 6 GHz.

Keywords

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