Giant Metal Sputtering Yields Induced by 20–5000 keV/atom Gold Clusters
- 15 June 1998
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 80 (24) , 5433-5436
- https://doi.org/10.1103/physrevlett.80.5433
Abstract
Very large nonlinear effects have been found in to cluster-induced metal sputtering yield measurements over a broad projectile energy interval from 20 keV/atom to 5 MeV/atom. The sputtering yield maxima were found at the same total energy but not at the same energy/atom as expected. For a yield as high as 3000 was reached at 150 keV/atom while the yield was only 55 at the same velocity.
Keywords
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