Theoretical approach to chemical vapour deposition in the atomic system Ti-Si-C-CI-H
- 1 January 1989
- journal article
- Published by Springer Nature in Journal of Materials Science Letters
- Vol. 8 (1) , 98-101
- https://doi.org/10.1007/bf00720264
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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