Ion-implanted GaAs slow wave monolithic structure
- 31 May 1987
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 30 (5) , 497-502
- https://doi.org/10.1016/0038-1101(87)90204-8
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- MeV Si implantation in GaAsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985